Material or article handling – Device for emptying portable receptacle – Nongravity type
Patent
1986-07-15
1989-02-28
Brown, Peter R.
Material or article handling
Device for emptying portable receptacle
Nongravity type
414225, 414283, 414752, 4147444, B65H 508
Patent
active
048080594
ABSTRACT:
Apparatus and a method for transferring one or more workpieces from a first location to a second location in an automated fashion. The apparatus includes a wafer transfer arm having a vacuum means at one end thereof for removable attachment to the underside of a workpiece to cause the workpiece to be moved from a first location to a second location. The transfer arm is coupled at the opposite end thereof to a post which is coupled to drive means for moving the arm in three degrees of freedom, namely along an X direction, along a Z direction and in a rotative direction. A reversible drive motor is provided for each degree of freedom and the motors are mounted on a carriage in a manner such that the motors can be simultaneously actuated under the control of a computerized control means. Thus, with a program coupled to the control means, the transfer arm can be made to perform a series of steps sequentially to move one or more workpieces from a first location, such as a wafer cassette, to a processing station.
REFERENCES:
patent: 3406837 (1968-10-01), Kirsch et al.
patent: 3823836 (1974-07-01), Cheney et al.
patent: 4501527 (1985-02-01), Jacoby et al.
patent: 4566726 (1986-01-01), Correnti et al.
patent: 4597708 (1986-07-01), Wheeler et al.
patent: 4648786 (1987-03-01), Sakurai
Brown Peter R.
Peak Systems, Inc.
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