Apparatus and method for transferring substrate

Details Apparatus and method for transferring substrate Apparatus and method for transferring substrate

2011-06-21

2011-06-21

Fox, Charles A (Department: 3652)

Material or article handling

Device for emptying portable receptacle

With container opening means

C294S064200

Reexamination Certificate

active

07963737

ABSTRACT:
Provided are an apparatus and method for transferring substrates. The substrate transferring apparatus is provided with a plurality of blades capable of withdrawing wafers from inside a container. Withdrawing members are elevated within coupling holes formed in the blades, and wafers are withdrawn by elevating and protruding the withdrawing members from the coupling holes of the blades. The withdrawing members are formed to be hollow, and are selectively elevated from the blades by supplying gas therein. Alternately, the withdrawing members are rotatably connected to the blades, and wafers are withdrawn when the withdrawing members are pivoted to protrude from the blades. Here, a withdrawing member includes a rotating shaft, and is pivoted when tension is applied to a wire wound around the rotating shaft. The wound wire is rotated by a driver that is selectively operated by a controller.

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patent: 10-2004-0098329 (2004-11-01), None
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