Optics: measuring and testing – Shape or surface configuration – Triangulation
Reexamination Certificate
2005-11-23
2008-10-14
Lauchman, L. G. (Department: 2877)
Optics: measuring and testing
Shape or surface configuration
Triangulation
C356S601000
Reexamination Certificate
active
07436524
ABSTRACT:
The present invention has a three-dimensional apparatus including a lattice pattern placed in an optical path and having a slit-like light transmitting portion formed of pitches set at fixed intervals, and a projecting optical system that projects a lattice pattern image formed by the lattice pattern on the sample so that the image is inclined at a predetermined angle. A lattice pitch is determined on the basis of set parameters including the magnification of an observing system. A pattern is formed by the lattice pitch. The pattern is used to pick up a deformed lattice pattern image using a TV camera. An image of each position is acquired while shifting the lattice pattern over several levels. A phase is determined. A height is then determined using the difference between the phase and a basic phase corresponding to a pre-provided magnification or the like. The height is then displayed.
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Tonooka, M., et al., “Surface Profile Measurement by Phase Detection using Grating Projection Method”, Journal of the Japan Society for Precision Engineering vol. 66, No. 1, 2000.
Obuchi Hideki
Ryu Go
Utsugi Hironori
Lauchman L. G.
Olympus Corporation
Scully Scott Murphy & Presser, PC
Underwood Jarreas C
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