Apparatus and method for the transfer and delivery of high purit

Details Apparatus and method for the transfer and delivery of high purit Apparatus and method for the transfer and delivery of high purit

1990-09-17

1992-09-22

Hajec, Donald T.

Dispensing

Processes of dispensing

222 59, 222 61, 222 71, 222135, 222152, 222189, 222318, 222399, 137205, 137208, 137209, B67D 508

Patent

active

051489457

ABSTRACT:
The present invention provides improved method and apparatus for the transfer and delivery of very high purity chemicals for use in semiconductor production and similar processes. By employing multiple alternating pressure vessels, chemicals are drawn from virtually any bulk source and delivered to one or more end-users. The use of a vacuum system to draw chemicals through sealed conduits eliminates the need for pumps which are a source of both maintenance problems and contamination in the system. Multiple vessels provide for a variety of flow options, which include continuous chemical delivery to the end-users, recirculation and regular filtration during periods of low use, and built-in redundancy to avoid system shut down if there is a component failure.

REFERENCES:
patent: 1460389 (1923-07-01), Mauclere
patent: 2362724 (1944-11-01), Shea
patent: 3370755 (1968-02-01), Querner
patent: 3746570 (1973-07-01), McIntosh
patent: 4204612 (1980-05-01), Schrader et al.
Advertisement: ChemFill--Chemical Delivery System--Brochure of FSI International, Chaska, Minn., Feb. 1988.
Advertisement: "System Overview and Installation Planning" and Overview of Computerized Chemical Distribution Systems--Brochure of Systems Chemistry Incorporated, Milpitas, Calif., May 1989.
Advertising Brochure: Unique Solutions to the Handling and Dispensing of Chemicals With a Commitment to Quality and Support--Integrated Designs, Inc., Dallas, Tex.

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