Apparatus and method for the immersion cleaning and transport of

Details Apparatus and method for the immersion cleaning and transport of Apparatus and method for the immersion cleaning and transport of

1995-08-07

1997-07-29

Graybill, David E.

Metal working

Barrier layer or semiconductor device making

437210, 414935, 454187, 134 32, 134 83, 134133, 134165, H01L 21304, H01L 21306, B01L 100

Patent

active

056517971

ABSTRACT:
An ultrasonic immersion cleaning tank is constructed to serve as a pass-through between a processing environment and a clean room. The tank is sited as the entryway into a bounded clean room. Particle barriers and positive pressure are utilized to reduce entry of contaminants into the clean room. The components after cleaning are withdrawn from the tank directly into the clean room environment thereby greatly reducing surface contamination thereof.

REFERENCES:
patent: 4855023 (1989-08-01), Clark et al.
patent: 5269643 (1993-12-01), Kodama et al.
patent: 5429642 (1995-07-01), Ohkuma

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