Apparatus and method for the fabrication of semiconductor circui

Fishing – trapping – and vermin destroying

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437 8, H01L 2170

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active

052525082

ABSTRACT:
A plurality of semiconductor elements or element groups in which the shapes, for example, the channel lengths, are slightly different from each other, are designed in advance, and are then fabricated on a semiconductor substrate. Once the main part of the elements, for example, the channel lengths, have been formed on the substrate, the shapes of these elements are measured. According to the measured data, particular elements or element groups which satisfy the required design values of the elements are selected for wirings and connectings to make products. So, the fabrication yield of the finished procucts, for example, made by the master slice approach or the gate array approach can be greatly improved.

REFERENCES:
patent: 4956611 (1990-09-01), Maltiel
patent: 5010029 (1991-04-01), Liu et al.

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