Apparatus and method for the determination of grain size in thin

Details Apparatus and method for the determination of grain size in thin Apparatus and method for the determination of grain size in thin

1998-07-07

2000-03-14

Kim, Robert H.

Optics: measuring and testing

By dispersed light spectroscopy

Utilizing a spectrometer

356355, G01B 902

Patent

active

060380268

ABSTRACT:
A method for the determination of grain size in a thin film sample comprising the steps of measuring first and second changes in the optical response of the thin film, comparing the first and second changes to find the attenuation of a propagating disturbance in the film and associating the attenuation of the disturbance to the grain size of the film. The second change in optical response is time delayed from the first change in optical response.

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