Apparatus and method for testing substrate

Details Apparatus and method for testing substrate Apparatus and method for testing substrate

2005-01-18

2005-01-18

Lee, John R. (Department: 2881)

Radiant energy

Means to align or position an object relative to a source or...

C250S492220

Reexamination Certificate

active

06844559

ABSTRACT:
A substrate testing apparatus for testing a substrate by irradiation of electron beam comprises a scan parameter calculating unit, a stage control unit for controlling the movement of a stage, and an electron beam control unit for controlling an irradiating position of electron beam. The scan parameter calculating unit calculates a stage speed and the irradiating position of electron beam on the basis of an array of measurement points in a unit area set for each substrate species of object to be tested. The scan parameters for the substrate species are automatically calculated, and the driving of the testing apparatus is controlled in accordance with the calculated parameters, whereby it is unnecessary to restart the software.

REFERENCES:
patent: 5821550 (1998-10-01), Yamashita
patent: 6242751 (2001-06-01), Takemoto et al.
patent: 6433872 (2002-08-01), Nishi et al.
patent: 6490025 (2002-12-01), Makinouchi et al.
patent: 6566662 (2003-05-01), Murakami et al.
patent: 20040174182 (2004-09-01), Toro-Lira et al.

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