Apparatus and method for testing pixels arranged in a matrix...

Details Apparatus and method for testing pixels arranged in a matrix... Apparatus and method for testing pixels arranged in a matrix...

2005-03-29

2005-03-29

Zarneke, David (Department: 2829)

Electricity: measuring and testing

Impedance, admittance or other quantities representative of...

Lumped type parameters

C324S1540PB, C345S205000, C349S048000

Reexamination Certificate

active

06873175

ABSTRACT:
An apparatus for testing plural pixels arranged in a matrix array on a TFT substrate comprises an electron gun for incidenting the electron beam to the TFT substrate, a secondary electron detector for detecting the amount of secondary electrons generated by incidenting the electron beam to the TFT substrate, and a stage for carrying the TFT substrate which is held thereon. The electron gun is placed against the TFT substrate held on the stage and incidents the electron beam to each basic scanning area. The electron gun scans the electron beam in one basic scanning area a predetermined number of times to obtain a secondary electron waveform necessary for testing the presence/absence of a defect in the pixel. The stage is always moved while the electron gun scans the electron beam in each basic scanning area, whereby the entire area of the TFT substrate is tested.

REFERENCES:
patent: 4870357 (1989-09-01), Young et al.
patent: 5504438 (1996-04-01), Henley
patent: 5982190 (1999-11-01), Toro-Lira
patent: 6033281 (2000-03-01), Toro-Lira
patent: 6075245 (2000-06-01), Toro-Lira

Affiliated with

Also associated with

Rating

Apparatus and method for testing pixels arranged in a matrix... does not yet have a rating. At this time, there are no reviews or comments for this patent.

If you have personal experience with Apparatus and method for testing pixels arranged in a matrix..., we encourage you to share that experience with our LandOfFree.com community. Your opinion is very important and Apparatus and method for testing pixels arranged in a matrix... will most certainly appreciate the feedback.

Rate now

Comments { 0 }

Profile ID: LFUS-PAI-O-3385974