Apparatus and method for testing electrical characteristics...

Electricity: measuring and testing – Fault detecting in electric circuits and of electric components – Of individual circuit component or element

Reexamination Certificate

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Reexamination Certificate

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11296655

ABSTRACT:
An apparatus for testing electrical characteristics of a semiconductor workpiece includes a probe card having probes and signal pads electrically connected to the probes, wherein the probes are in contact with a workpiece during a test process; a test head electrically connected with a performance board having signal pads; and a pogo module having pogo pins for electrically connecting the signal pads of the probe card with the signal pads of the performance board during a test process, wherein at least two the pogo pins are electrically connected in parallel to one of the signal pads of the probe card, and wherein at least two pogo pins are electrically connected in parallel to one of the signal pads of the performance board. A resistance caused by the pogo pins is lowered to test the electrical characteristics of a semiconductor workpiece more precisely and a test process is performed even when one of the pogo pins is in poor contact with a pad.

REFERENCES:
patent: 5371654 (1994-12-01), Beaman et al.
patent: 5521522 (1996-05-01), Abe et al.
patent: 6252415 (2001-06-01), Lefever et al.
patent: 06-216205 (1994-08-01), None
patent: 11-064440 (1999-03-01), None
patent: 2004-212233 (2004-07-01), None
patent: 1997-046792 (1997-07-01), None

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