Electricity: measuring and testing – Measuring – testing – or sensing electricity – per se – With rotor
Reexamination Certificate
1999-07-09
2001-11-20
Metjahic, Safet (Department: 2858)
Electricity: measuring and testing
Measuring, testing, or sensing electricity, per se
With rotor
C324S758010
Reexamination Certificate
active
06320372
ABSTRACT:
BACKGROUND OF THE INVENTION
1). Field of the Invention
This invention relates to an apparatus for testing a substrate having a plurality of terminals, and to a method of testing a substrate having a plurality of terminals.
2). Discussion of Related Art
Electronic circuits are often made by manufacturing a plurality of electronic devices such as transistors, capacitors, diodes, etc. in and on a semiconductor wafer. The devices are interconnected with one another in an integrated circuit by metal lines that are deposited on the wafer. A plurality of terminals are formed on a surface of the wafer and are connected to the metal lines. Electric signals can be provided to or received from the integrated circuit through the terminals.
A number of the integrated circuits are usually formed in and on a single wafer. The integrated circuits are located in the form of dice in rows and columns on the wafer. The wafer is subsequently sawed so that the dice are singulated from one another.
Before the wafer is sawed, the integrated circuit of each die is tested for defects. A probe card having a plurality of probes is used for making an electrical connection to the terminals. Each probe has a contact region which contacts a respective one of the terminals. The probes are connected to an electrical tester. The electrical tester provides signals through the probes and the terminals to the integrated circuit, and receives signals from the integrated circuit through the terminals and the probes.
Due to many factors, some of which are discussed hereinbelow, proper contact between the probes and the terminals is often difficult to obtain. Contact regions of the probes may, for example, be located in one plane and the terminals may be located in another plane which is not parallel to the plane of the contact regions. When the terminals and the contact regions are moved into engagement with the terminals, some probes may create more force on some terminals than others. In more extreme situations proper contact between a probe and a terminal is not provided. Other problems such as rotational or positional misalignment may also occur.
SUMMARY OF THE INVENTION
The invention provides an apparatus for testing a substrate having a plurality of terminals. The apparatus includes a frame, a first arrangement secured to the frame, a mounting arrangement secured to the frame, and a second arrangement secured to the mounting arrangement. One of the first and second arrangements is a holder capable of holding the substrate so that the terminals are located in the first plane. The other one of the first and second arrangements is a probe card including a probe card backing member and a plurality of probes extending from the probe card backing member, the probes having contact regions located in a second plane. The mounting apparatus includes at least a first member which is adjustable relative to the frame so as to pivot the second arrangement relative to the first arrangement between an orientation wherein there is an angle between the first and second planes and an orientation wherein the first and second planes are substantially parallel to one another. The second arrangement is movable relative to the frame between a position wherein the contact regions are spaced from the terminals and a position wherein each contact region contacts a respective one of the terminals.
The apparatus preferably includes a controller which receives a signal indicating an orientation of the first plane while the second arrangement is moved towards the position wherein each contact region contacts a respective one of the terminals. The controller controls the first member so as to maintain the orientation of the first plane parallel to the orientation of the second plane while the second arrangement is moved towards the position wherein each contact region contacts a respective one of the terminals.
The second arrangement preferably pivots about a first axis and the mounting arrangement preferably further includes at least a second member which is adjustable relative to the frame so as to pivot the second arrangement, relative to the first arrangement, about a second axis which is at an angle relative to the first axis, between an orientation wherein there is an angle between the first and second planes and an orientation wherein the first and second planes are substantially parallel to one another.
The apparatus may further include a member which is adjustable so as to rotate the second arrangement relative to the first arrangement without necessarily changing an angle between the first and second planes.
The mounting arrangement may move the second arrangement towards the first arrangement so as to bring the contact regions into contact with the terminals.
The apparatus may further include an electrical tester within communication with the probes so as to be capable of testing the substrate by providing electrical signals through the probes and the terminals to the substrate.
The apparatus may further include at least one detector capable of detecting the location of the first plane, and detecting the location of the second plane. A controller may form part of the apparatus and may receive information from the detector of the locations of the first and second planes. The controller may be capable of adjusting the first member relative to the frame so as to adjust the first and second planes relative to one another between the orientation wherein there is an angle between the first and second planes and the orientation wherein the first and second planes are substantially parallel.
The first arrangement is preferably the probe card and the second arrangement is preferably the holder.
The invention also provides an apparatus for testing a substrate having a plurality of terminals, the apparatus including a frame, a probe card, a mounting arrangement, and a holder. The probe card is secured to the frame and has a probe card backing member and a plurality of probes extending from the probe card backing member. The probes have contact regions located in a first plane. The mounting arrangement includes at least a first member which is adjustable relative to the frame so as to pivot the holder relative to the frame between a first orientation wherein there is an angle between the first and second planes and an orientation wherein the first and second planes are substantially parallel to one another. The probe card and the holder are movable relative to one another between a position wherein the contact regions are spaced from the terminals and a position wherein each contact regions contacts a respective one of the terminals.
The holder may be movable relative to the frame between the position wherein the contact regions are spaced from the terminals and the position wherein each contact region contacts a respective one of the terminals.
The invention also provides an apparatus for testing a substrate having a plurality of terminals. The apparatus includes a frame, a first arrangement secured to the frame, a plurality of members secured to the frame, each member being adjustable relative to the frame, and a second arrangement secured to the members. One of the first and second arrangements is a holder capable of holding the substrate so that the terminals are located in a first plane. The other one of the first and second arrangements is a probe card including a probe card backing member and a plurality of terminals extending from the probe card backing member, the probes having contact regions located in a second plane. The members are selectively adjustable so as to be capable of pivoting the second arrangement about a first axis between an orientation wherein there is an angle between the first and second planes and an orientation wherein the first and second planes are substantially parallel to one another, pivoting the second arrangement about a second axis, which is at an angle relative to the first axis, between an orientation wherein there is an angle between the first and second planes and an orientation wherein the first and
Blakely & Sokoloff, Taylor & Zafman
Electroglas, Inc.
Hollington Jermele M.
Metjahic Safet
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