Apparatus and method for surface treatment, and apparatus and me

Metal fusion bonding – With means to juxtapose and bond plural workpieces – Wire lead bonder

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228 51, 42218605, 156345P, B23K 3700, B01J 1908, C23F 107

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active

058234160

ABSTRACT:
There are disclosed a surface treatment device and a wire bonding device which are compact in size, have a high processing ability, are simple in construction, and achieve a low cost. The surface treatment device includes a base having a transfer path for transferring an object, a lid provided above the base for movement into and out of contact with an upper surface of the base, the lid contacting the base to form a sealed space on the upper surface of the base, an engagement and disengagement mechanism for moving the lid into and out of contact with the base, a transfer mechanism for feeding the object, disposed on the transfer path, into and out of a position beneath the lid when the lid is out of contact with the base, and a treatment portion for surface treating electrodes of the object disposed in the sealed space. A wire bonding mechanism is provided at a downstream portion of the transfer path.

REFERENCES:
patent: 4840702 (1989-06-01), Schumacher, III
patent: 4861563 (1989-08-01), Shekerjian et al.
patent: 4908095 (1990-03-01), Kagatsume et al.
patent: 5433371 (1995-07-01), Morisako
"Surface Treatment for Tungsten to Facilitate Wire Bonding," IBM Tech. Discl. Bull., vol. 33, No. 2, Jul. 1990, p. 89.

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