Radiant energy – Electrically neutral molecular or atomic beam devices and...
Reexamination Certificate
2011-02-22
2011-02-22
Berman, Jack I (Department: 2881)
Radiant energy
Electrically neutral molecular or atomic beam devices and...
C250S492100, C250S492200, C250S492210
Reexamination Certificate
active
07893397
ABSTRACT:
An apparatus and method for using high beam currents in FIB circuit edit operations, without the generation of electrostatic discharge events. An internal partial chamber is disposed over the circuit to be worked on by the FIB. The partial chamber has top and bottom apertures for allowing the ion beam to pass through, and receives a gas through a gas delivery nozzle. A non-reactive gas, or a combination of a non-reactive gas and a reactive gas, is added to the FIB chamber via the partial chamber, until the chamber reaches a predetermined pressure. At the predetermined pressure, the gas pressure in the partial chamber will be much greater than that of the chamber, and will be sufficiently high such that the gas molecules will neutralize charging induced by the beam passing through the partial chamber.
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PCT Patent Application No. PCT/CA2006/001815, International Search Report dated Feb. 12, 2007.
Krechmer Alexander
Lagarec Ken Guillaume
Phaneuf Michael William
Berman Jack I
Borden Ladner Gervais LLP
Chang Hanway
Fibics Incorporated
Hung Shin
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