Apparatus and method for surface inspection

Details Apparatus and method for surface inspection Apparatus and method for surface inspection

1998-02-13

1999-07-06

Kim, Robert

Optics: measuring and testing

Inspection of flaws or impurities

Surface condition

3562375, 3562373, G01N 2100

Patent

active

059203870

ABSTRACT:
An optical element is provided, to move an optical axis of a scanning light incident to a substrate so that illumination positions on photodetecting faces of two photodetectors agree or almost agree with each other. Respective surface information signals sent out from the two photodetectors are accordingly agreed or a difference of the signals is minimized, whereby the measuring accuracy in surface inspection is improved.

REFERENCES:
patent: 4740708 (1988-04-01), Batchelder
patent: 4831274 (1989-05-01), Kohno et al.
"Laser Range Finder Based on Synchronized Scanners," Marc Rioux, vol. 23, No. 21, pp. 3837-3844, issued Nov. 1, 1984.

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