Apparatus and method for surface analysis

Radiant energy – Ionic separation or analysis – Ion beam pulsing means with detector synchronizing means

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250305, H01J 4940

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056659679

ABSTRACT:
An apparatus and a method for the analysis of the surface of a specimen by the techniques of electron energy spectroscopy and secondary ion time-of-flight mass spectrometry. The apparatus provides a substantially conventional electron energy analyzer, typically having hemispherical electrodes. The energy analyzer is used as an ion deflector and in conjunction with a linear drift region and a pulsed primary ion beam gun provides a time-of-flight mass spectrometer having at least first-order time focusing properties. By using the energy analyzer in both techniques a combined instrument is provided at much lower cost than prior combined instruments which comprise different analyzers for the two techniques.

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