Radiant energy – Ionic separation or analysis – Ion beam pulsing means with detector synchronizing means
Patent
1996-05-24
1997-09-09
Berman, Jack I.
Radiant energy
Ionic separation or analysis
Ion beam pulsing means with detector synchronizing means
250305, H01J 4940
Patent
active
056659679
ABSTRACT:
An apparatus and a method for the analysis of the surface of a specimen by the techniques of electron energy spectroscopy and secondary ion time-of-flight mass spectrometry. The apparatus provides a substantially conventional electron energy analyzer, typically having hemispherical electrodes. The energy analyzer is used as an ion deflector and in conjunction with a linear drift region and a pulsed primary ion beam gun provides a time-of-flight mass spectrometer having at least first-order time focusing properties. By using the energy analyzer in both techniques a combined instrument is provided at much lower cost than prior combined instruments which comprise different analyzers for the two techniques.
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Coxon Peter A.
McIntosh Bruce J.
Berman Jack I.
Nguyen Kiet T.
Thermo Instrument Systems Inc.
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