Photocopying – Projection printing and copying cameras – Detailed holder for photosensitive paper
Patent
1995-01-26
1995-11-28
Gellner, Michael L.
Photocopying
Projection printing and copying cameras
Detailed holder for photosensitive paper
355 53, 355 91, 355 94, 269 21, G03B 2742
Patent
active
054712793
ABSTRACT:
A substrate supporting apparatus designed so that a substrate received and delivered by the apparatus can be positioned easily with improved accuracy. For this positioning, pressurized air is supplied between a float chuck and a base chuck of the substrate supporting apparatus to float the float chuck, and peripheral end surfaces of the float chuck are supported by cylinder pins and fixing pins. In this state, a substrate is received from a transport hand and is attracted to a surface of the float chuck. Thereafter, the cylinder pins are caused to recede, and the float chuck is moved together with the substrate by pressing forces of pressing springs to abut reference pins. As a result, a changeover valve is operated by output signals from photosensors to attract the float chuck to the base chuck.
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patent: 5085558 (1992-02-01), Engelbrecht
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Canon Kabushiki Kaisha
Gellner Michael L.
Malley D. P.
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