Optics: measuring and testing – By dispersed light spectroscopy – Utilizing a spectrometer
Patent
1997-01-27
1998-01-20
Font, Frank G.
Optics: measuring and testing
By dispersed light spectroscopy
Utilizing a spectrometer
356359, G01B 902
Patent
active
057106312
ABSTRACT:
An interferometer is used to locate and examine defects in a test surface of a test specimen. Defects are first located as the test surface is driven past the objective of the interferometer at a constant speed, with a darkfield interferogram being examined as it flows across a row of CCD elements. During this process, the location of each defect is stored. Next, the test specimen is sequentially moved into the locations at which static measurements are made using an area array of CCD elements. During these measurements, the phase angle relationship of the interferometer is varied so that heights of surface segments may be calculated. If some to these segments are located more than a quarter wave length of the interferometer light source from the surface at which the darkfield is established, a process is used to perform height corrections for segments within transition boundaries.
REFERENCES:
patent: 5469259 (1995-11-01), Golby et al.
Bou-Ghannam Akram Aref
Dorundo Alan David
Lisanke Michael Gerard
Lu Huizong
Pena Lanphuong Thi
Davidge Ronald V.
Font Frank G.
International Business Machines - Corporation
Merlino Amanda
Tomlin Richard A.
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