Apparatus and method for storing and transporting substrates in

Conveyors: power-driven – With means to facilitate working – treating – or inspecting...

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198472, 198580, 118 49, 204298, 312268, 185 39, B23Q 703

Patent

active

041130820

ABSTRACT:
Apparatus and method are disclosed for supporting and transporting a multiplicity of workpieces during a process such as a batch-type vacuum coating process. The workpieces are placed in two stacks adjacent to process equipment inside a sealable chamber, and means are provided for moving substrates within each stack and between the stacks. Preferably, workpieces are successively conveyed from the top of one stack, through the process, to the top of the other stack, and simultaneously from the bottom of the second stack to the bottom of the first stack. The workpieces in the first stack are raised so that successive workpieces are presented at the top of the first stack. Similarly, the workpieces in the second stack are lowered to present successive workpieces at the bottom. Workpieces may be circulated through the stacks as many times as desired and may be processed one or more times during a single circuit.

REFERENCES:
patent: 1837605 (1931-12-01), Baker
patent: 2234081 (1941-03-01), Nebuda
patent: 3321092 (1967-05-01), Brichard

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