Apparatus and method for spectroscopic measurement as a deflecti

Optics: measuring and testing – For light transmission or absorption

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G01N 2534

Patent

active

057370869

DESCRIPTION:

BRIEF SUMMARY
The invention relates to a spectrometer, in particular to the light intensity detectors in a spectrometer, and its use.


BACKGROUND OF THE INVENTION

Spectrometers or spectroscopes are defined as instruments for analyzing the spectral energy distribution of electromagnetic radiation. They generally incorporate a source or sources of electromagnetic radiation, a dispersing system or monochromator, and a detector monitoring the intensity of the electromagnetic radiation. The known spectrometers are designed for a broad range of the electromagnetic spectrum. Spectrometers for recording x-ray, ultraviolet (uv), visible (vis), infrared, or microwave, adsorption and emission spectra can be found.
After the dispersion of light was discovered by Newton almost three centuries ago, spectroscopes went through a tremendous development. All aspects of the fundamental spectrometer, as described above, through all its variants and differing fields of application are covered by numerous publications. Yet, none of these can be considered to be particularly close to the current invention, as far the applicant is aware of.
Another technical field, being of importance to the current invention, is known as scanning probe microscopy, though no ordinary person skilled in the art would consider it to be related to the technical field of spectroscopy. To the best knowledge of the applicant, no direct relationship between both technical fields has been so far established.
The scanning probe microscopy, the most prominent representative of which is known as scanning tunneling microscope or STM, is accepted since its first publication by G. Binnig, H. Rohrer, Ch. Gerber, and E. Weibel in: Phys. Rev. Lett. 49, p. 59 (1982) as a valuable tool for imaging surfaces with atomic resolution. The concept of the STM was further developed to another type of microscope with atomic resolution, the atomic force microscope or AFM. The first description of an AFM was published in: Phys. Rev. Lett. 56, p. 930-933 (1996) by G. Binnig, C. F. Quate and Chr. Gerber.
The basic setup for an AFM involves the use of a flexible element to which a scanning tip or microprobe is attached. This flexible element is generally called cantilever and is, for example, made by silicon micromanufacturing. In operation, the tip is scanned over the surface of a sample. When the tip comes closer to the surface, it experiences forces which cause the cantilever to bend. The deflection of the cantilever is then monitored and converted into a `force` image of the surface.
A third element of importance to the current invention is the so-called bimetal or thermobimetal effect: two stripes of metal being thightly bonded or welded will bend when being subjected to heating. The bimetal effect has been brought into connection to the field of AFM by 0. Marti et al. in: Ultramicroscopy 42-44 (1992), pp. 345-350. It is, however, described merely as a source of nuisance to those working in this area.
With regard to the numerous efforts aimed at improving the sensitivity and handling of spectrometers or spectroscopes. It is an object of the invention to provide a new spectrometer. It is a particular object of the invention to provide the known types of spectrometer with a new sensitive device for measuring the intensity of electromagnetic radiation.


SUMMARY OF THE INVENTION

The new spectrometer or spectroscope comprises at least one source of electromagnetic radiation, monochromator means for selecting a sharply defined range of said electromagnetic radiation, and means for detecting the intensity of said electromagnetic radiation, wherein said means comprises a flexible element with a least two layers of material having a different thermal expansion coefficient and means to detect a deflection of said flexible element. The new sensor is based on what is commonly known as bimetal or thermobimetal effect. Bimetal switches have found a wide spread application in many devices, though being more and more replaced by electronic devices. In principle, a bimetallic temperature sensor is mad

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patent: 5545897 (1996-08-01), Jack
Umeda et al, "Scanning Attractive Force Microscope using Photothermal Vibration", J. Vac. Sci. and Technology, B9(2) Mar./Apr. 1991.

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