Apparatus and method for slicing an ingot

Stone working – Sawing – Reciprocating

Reexamination Certificate

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C125S021000, C451S037000, C451S304000, C083S651100

Reexamination Certificate

active

07431028

ABSTRACT:
A method for slicing an ingot may improve nanotopography at a surface of a wafer. In the method, an ingot is sliced into a plurality of wafers via a slurry while slurry is supplied to a moving wire. A first wire to form a first slicing portion at the wafer firstly slices one side of the ingot. A second wire secondly slices the remaining portion of the ingot to form a second slicing portion continued from the first slicing portion, wherein the first wire has a smaller diameter than that of the second wire.

REFERENCES:
patent: 5715806 (1998-02-01), Tonegawa et al.
patent: 5937844 (1999-08-01), Kiuchi et al.
patent: 5947798 (1999-09-01), Toyama
patent: 6062209 (2000-05-01), Oishi
patent: 6352071 (2002-03-01), Kononchuk et al.
patent: 6802928 (2004-10-01), Nakashima
patent: 7025665 (2006-04-01), Bender
patent: 2004/0084042 (2004-05-01), McAulay et al.
patent: 2006/0249135 (2006-11-01), Matsumoto
patent: 9-262827 (1997-10-01), None
Patent Abstracts of Japan, Publication No. 09-262827; Date of Publication: 10-07-1997; in the name of Nakazato Yasuaki et al.

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