Stone working – Sawing – Endless
Patent
1998-07-01
2000-02-15
Morgan, Eileen P.
Stone working
Sawing
Endless
125 1602, 451304, B28D 102
Patent
active
060240806
ABSTRACT:
An apparatus and method for slicing a workpiece, in particular, a polysilicon or single crystal silicon ingot, utilizing a diamond impregnated wire saw in which either the workpiece (or ingot) is rotated, either continuously or reciprocally, about its longitudinal axis or the diamond wire saw is rotated, either reciprocally or continuously, about the longitudinal axis of the workpiece as the diamond wire is driven orthogonally to the longitudinal axis of the workpiece. When the relative rotation is continuous, the wire is advanced from a position tangentially adjoining the outer diameter ("OD") of the ingot to a position tangential to its center or inner diameter ("ID"). When the rotation is reciprocating, the wire is advanced from a position tangentially adjoining the outer diameter to a position through the workpiece. In both cases, the diamond wire cuts through the workpiece at a substantially tangential point to the cut instead of straight through up to the entire diameter of the piece and single crystal silicon ingots of 300 mm to 400 mm or more may be sliced into wafers relatively quickly, with minimal "kerf" loss and less extensive follow-on lapping operations.
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Laser Technology West Limited Brochure, "Diamond Wire Selection".
Laser Technology West Limited Brochure, "Solid State Controller/Capstan/Accessories".
Laser Technology West Limited Brochure, "Cutting with Diamond Wire".
Laser Technology West Limited Brochure, "Model 203000/Vertical Wire Saw".
Laser Technology West Limited Brochure, "Model 214000/Crystal Wire Saw".
Laser Technology West Limited Brochure, "Model 206000/Laboratory Wire Saw".
Laser Technology West Limited Brochure, "Model 208000/Guillotine Series Saws".
Laser Technology West Limited Brochure, "Automatic Guillotine Series Saws".
Laser Technology West Limited Brochure, "Model 228120/Profile Wire Saw".
Kubida William J.
Laser Technology West Limited
Morgan Eileen P.
Wahl John R.
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