Radiant energy – Invisible radiant energy responsive electric signalling – Infrared responsive
Reexamination Certificate
2008-05-27
2008-05-27
Sung, Christine (Department: 2884)
Radiant energy
Invisible radiant energy responsive electric signalling
Infrared responsive
Reexamination Certificate
active
07378655
ABSTRACT:
A method for manufacturing a sensing device, such as a bolometer device or other devices. The method includes providing a substrate, e.g., silicon wafer. The method includes forming a first reflection layer overlying the substrate and forming a first electrode layer overlying the substrate. The method includes forming a sacrificial layer overlying a portion of the first reflection layer and a portion of the first electrode layer. The sacrificial layer is patterned using photolithography techniques. The patterned sacrificial layer corresponds to a cavity region. The method also forms a second electrode layer overlying the sacrificial layer and forms an elastic layer overlying the patterned sacrificial layer. The elastic layer encloses the cavity region corresponding to the patterned sacrificial layer. The method releases the sacrificial layer to form an opening in the cavity region.
REFERENCES:
patent: 4752694 (1988-06-01), Hegel, Jr. et al.
patent: 5286976 (1994-02-01), Cole
patent: 5300915 (1994-04-01), Higashi et al.
patent: 5420419 (1995-05-01), Wood
patent: 6083557 (2000-07-01), Belcher et al.
patent: 6621083 (2003-09-01), Cole
patent: 2001/0015810 (2001-08-01), Hara et al.
patent: 2005/0226281 (2005-10-01), Faraone et al.
Terre et al. “Microbolometer development and production at Indigo Systems”, downloaded at http://www.indigosystems.com/PDF/SPIE/SPIE—2003—Bolometers.pdf on Jan. 25, 2007.
“Uncooled Infrared Microbolometer” Honeywell Technology Licensing downloaded at http://honeywell.t2h.yet2.com/t2h/page/listing?keyword=&Id=111&qid at Jan. 25, 2007.
Liger Matthieu
Tai Yu-Chong
Tsai Jui-Che
Wu Ming C.
California Institute of Technology
Sung Christine
Townsend and Townsend / and Crew LLP
LandOfFree
Apparatus and method for sensing electromagnetic radiation... does not yet have a rating. At this time, there are no reviews or comments for this patent.
If you have personal experience with Apparatus and method for sensing electromagnetic radiation..., we encourage you to share that experience with our LandOfFree.com community. Your opinion is very important and Apparatus and method for sensing electromagnetic radiation... will most certainly appreciate the feedback.
Profile ID: LFUS-PAI-O-2808359