Thermal measuring and testing – Thermal calibration system
Reexamination Certificate
2006-03-28
2006-03-28
Verbitsky, Gail (Department: 2859)
Thermal measuring and testing
Thermal calibration system
C374S141000, C340S653000
Reexamination Certificate
active
07018093
ABSTRACT:
In a temperature controlling apparatus for controlling temperature by using a temperature sensor, a defect state of the temperature sensor is sensed by sensing a change of specific resistance of the temperature sensor. A temperature value of the temperature sensor is detected at each unit time during exchanging of a chemical solution or stopping of a process in a chamber of the semiconductor fabricating process. A lowest temperature among the detected temperature values and a reference temperature predetermined to sense the change of the specific resistance of the temperature sensor, are compared with each other. When the lowest temperature deviates from the reference temperature, a defect of the temperature sensor is confirmed and a message indicative of a defect state and an alarm are generated.
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Hwang Jong-Sub
Kim Jeong-Hwan
Park Ki-Hwan
Jagan Mirellys
Verbitsky Gail
Volentine Francos & Whitt pllc
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