Fluid handling – Processes
Reexamination Certificate
2005-09-27
2005-09-27
Scherbel, David A. (Department: 3753)
Fluid handling
Processes
C137S486000, C137S487500, C073S001350, C702S045000, C702S100000
Reexamination Certificate
active
06948508
ABSTRACT:
A mass flow controller includes a mass flow sensor and a calibrator configured to perform a self-calibration on the mass flow controller. The calibrator generates flow measurements that are used as “standards” and flow measurements from the mass flow sensor are correlated to flow measurements from the calibrator.
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Ambrosina Jesse
Kottenstette Nicholas
Shajii Ali
Smith John A.
Krishnamurthy Ramesh
McDermott Will & Emery LLP
MKS Instruments Inc.
Scherbel David A.
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