Apparatus and method for scribing a semiconductor wafer...

Details Apparatus and method for scribing a semiconductor wafer... Apparatus and method for scribing a semiconductor wafer...

2007-01-23

2007-01-23

Guadalupe-McCall, Yaritza (Department: 2859)

Geometrical instruments

Scriber

C033S503000, C033S549000

Reexamination Certificate

active

11136690

ABSTRACT:
A system for controlling scribing forces when scribing a semiconductor wafer includes supporting a scribe tool on an air bearing shaft. An encoder reads an encoder scale attached to the air bearing shaft and transport structure moves the tool support structure up or down to control the scribing force responsive to signals from the encoder.

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