Apparatus and method for screening using electrostatic adhesion

Details Apparatus and method for screening using electrostatic adhesion Apparatus and method for screening using electrostatic adhesion

1996-08-27

1999-04-06

Evans, Elizabeth

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Sheet including cover or casing

Complete cover or casing

428409, 428480, 428688, 428702, B32B 302

Patent

active

058915435

ABSTRACT:
The present invention relates generally to a new apparatus and method for screening using electrostatic adhesion. More particularly, the invention encompasses an apparatus that uses an electrostatic charge during the screening process for a semiconductor substrate. Basically, a backing layer is adhered to a green ceramic sheet using an electrostatic charge, while the green ceramic sheet is processed.

REFERENCES:
patent: 3892614 (1975-07-01), Levy
patent: 4275112 (1981-06-01), Savage
patent: 4457972 (1984-07-01), Griffith et al.
patent: 5167997 (1992-12-01), Chamberlain et al.

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