Apparatus and method for scanning laser imaging of macroscopic s

Optical: systems and elements – Compound lens system – Microscope

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359368, G02B 2106, G02B 2100

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active

057609519

ABSTRACT:
A confocal scanning beam optical imaging or mapping system for macroscopic samples is disclosed, in which an expanded laser beam passes through a scan system and a telecentric laser scan lens focuses the beam to a moving spot in the sample. Light reflected (or emitted) from the illuminated spot is collected by the laser scan lens, descanned by the scan system, and detected by a confocal detector. Confocal transmitted-light and non-confocal versions are also disclosed. This new scanning beam laser imaging system performs a rapid scan of a large sample with optical image slicing capability (using the confocal detector). Applications include fluorescent imaging of large biomedical specimens, including fluorescent gels, photoluminescence mapping of semiconductor samples, etc.

REFERENCES:
patent: 4806004 (1989-02-01), Wayland
patent: 5225923 (1993-07-01), Moutagu
patent: 5381224 (1995-01-01), Dixon et al.
patent: 5386112 (1995-01-01), Dixon
CJ Miner, "Non-destructive, Whole Wafer . . . ", 1992 see p. A10-All for description of apparatus.
G.E. Carver, "Scanned Photoluminescence with High . . . ", 1992, See p. A54 for description of apparatus.
Steiner & Thewalt, "Cryogenic, Whole-Wafer Imaging . . . ", 1992, see pp. A16-A17 for apparatus.
Dixon, Damaskinos & Atkinson, "A scanning confocal microscope for transmission and reflection imaging", 1991.
H J Hovel, "Scanned Photoluminescence of Semiconductors," 1992 -see p. A2, sect. 3 for equipment.
Moore & Miner, "A Spatially-resolved spectrally-resolved photoluminescence mapping system", 1990 see pp. 22-23.
Booker, Laczik and Kidd, "The Scanning infrared microscope (SIRM) . . . ", 1992, see pp. A111-A113 for apparatus.

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