Registers – Coded record sensors – Particular sensor structure
Reexamination Certificate
2005-06-07
2005-06-07
Stcyr, Daniel (Department: 2876)
Registers
Coded record sensors
Particular sensor structure
C235S462330
Reexamination Certificate
active
06902112
ABSTRACT:
Apparatus and method for scanning a surface. An optical system generates a light beam to illuminate a surface. A carrier supports the surface for reciprocating motion with respect to the light beam to form one axis of a raster. A propulsion system moves the carrier at a substantially constant speed and a position sensor provides an output signal representing the surface position with respect to the light beam. A control system responsive to the output signal modulates a sample period reciprocally to carrier speed to achieve substantially constant scan length per sample and to control data acquisition timing.
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Dorsel Andreas N.
Sadler John W.
Staton Kenneth L.
Agilent Technologie,s Inc.
Stcyr Daniel
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