Apparatus and method for rotating semiconductor objects

Details Apparatus and method for rotating semiconductor objects Apparatus and method for rotating semiconductor objects

1998-08-17

2000-08-29

Krizek, Janice L.

Material or article handling

Article reorienting device

Article reoriented by contact with fluid means

414816, B65G 4724

Patent

active

061098612

ABSTRACT:
A device and method for the automated rotating of semiconductor objects during the fabrication process is disclosed. The device uses a slotted base fixture with a channel, lifting members with ducts, and a vacuum. Semiconductor objects are rotated from a vertical position to a substantially horizontal essentially evenly spaced parallel configuration. The positioning of the semiconductor objects by the device is such that the facet end of each semiconductor object remains undisturbed. The configuration of the semiconductor objects allows for quick and easy transfer to a storage surface or transfer to further semiconductor processing steps.

REFERENCES:
patent: 4960360 (1990-10-01), Giannuzzi et al.
patent: 5044872 (1991-09-01), Hunt et al.

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