Electricity: measuring and testing – Fault detecting in electric circuits and of electric components – Of individual circuit component or element
Patent
1996-11-07
1999-03-16
Brown, Glenn W.
Electricity: measuring and testing
Fault detecting in electric circuits and of electric components
Of individual circuit component or element
324754, 414935, 414941, 269 21, 269112, 269903, B25B 1100, B65H 908, G01R 3126
Patent
active
058835229
ABSTRACT:
A retaining apparatus for retaining a semiconductor wafer on the surface of a chuck. The retaining apparatus includes elongate shafts each positioned adjacent to a perimeter of the surface of the chuck and so that a lengthwise axis of each shaft is substantially perpendicular to the surface of the chuck. Two shafts are located on one side of a diameter of the surface of the chuck and two additional shafts are located on another side of the diameter of the surface of the chuck. Retainer members are connected to each of the shafts. The retainer members extend over the surface of the chuck and portions of the semiconductor wafer resting thereon in order to retain the semiconductor wafer thereagainst when the retainer members are in a closed position. Chambers each receive another end of each of the shafts. A vacuum source is coupled to the chambers to provide suction inside the chambers to pull the shafts deeper into their respective chambers so that the retainer members move from an open position where they are spaced apart from the semiconductor wafer to the closed position where they contact portions of the semiconductor wafer. Methods of retaining a semiconductor wafer on a first surface of a chuck and testing a semiconductor wafer are also disclosed.
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patent: 5316278 (1994-05-01), Sherstinsky et al.
patent: 5437757 (1995-08-01), Rice et al.
Brown Glenn W.
National Semiconductor Corporation
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