Apparatus and method for removing contaminant on original,...

Details Apparatus and method for removing contaminant on original,... Apparatus and method for removing contaminant on original,...

2008-01-15

2008-01-15

Nguyen, Henry Hung (Department: 2851)

Photocopying

Projection printing and copying cameras

Step and repeat

C355S030000

Reexamination Certificate

active

07319507

ABSTRACT:
At least one exemplary embodiment is directed to an apparatus which includes an original stage, to hold an original, which moves in a scan direction, an illumination optical system configured to illuminate the original held by the original stage with exposure light, a substrate stage configured to hold a substrate and to move in a scan direction, a projection optical system configured to project a pattern of the original onto the substrate with the exposure light, and an irradiation unit configured to irradiate the original held by the original stage. Irradiation by the irradiation unit and movement of the original stage in the scan direction are carried out substantially in parallel with each other so as to remove a contaminant on the original.

REFERENCES:
patent: 4980536 (1990-12-01), Asch
patent: 6038015 (2000-03-01), Kawata
patent: 6385290 (2002-05-01), Kondo
patent: 6538722 (2003-03-01), Matsumoto et al.
patent: 6781673 (2004-08-01), Moors et al.
patent: 6980278 (2005-12-01), Aoyama et al.
patent: 2005/0069433 (2005-03-01), Hayashi
patent: 64-012526 (1989-01-01), None
patent: 2000-088999 (2000-03-01), None

Affiliated with

Also associated with

Rating

Apparatus and method for removing contaminant on original,... does not yet have a rating. At this time, there are no reviews or comments for this patent.

If you have personal experience with Apparatus and method for removing contaminant on original,..., we encourage you to share that experience with our LandOfFree.com community. Your opinion is very important and Apparatus and method for removing contaminant on original,... will most certainly appreciate the feedback.

Rate now

Comments { 0 }

Profile ID: LFUS-PAI-O-2807069