Gas separation: processes – Degasification of liquid – Plural successive degassing treatments
Reexamination Certificate
2005-08-11
2009-11-10
Smith, Duane (Department: 1797)
Gas separation: processes
Degasification of liquid
Plural successive degassing treatments
C095S254000, C095S260000, C096S204000, C096S215000, C096S219000, C205S099000
Reexamination Certificate
active
07615103
ABSTRACT:
The present invention is directed to methods and apparatuses for removing bubbles from a process liquid. The process liquid can comprise a plating solution used in a plating tool. The process liquid is supplied to a tank. A plurality of streams of the process liquid are directed towards a surface of the process liquid from below. This can be done by feeding the process liquid to a flow distributor comprising a plurality of openings providing flow communication between an inner volume of the flow distributor and a main volume of the tank. Before leaving the tank through an outlet, the process liquid flows through a flow barrier.
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Hartz Helge
Nopper Markus
Preusse Axel
Advanced Micro Devices , Inc.
Smith Duane
Theisen Douglas J
Williams Morgan & Amerson P.C.
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