Apparatus and method for removing a CMP polishing pad from a...

Details Apparatus and method for removing a CMP polishing pad from a... Apparatus and method for removing a CMP polishing pad from a...

2006-10-24

2006-10-24

Thomas, David B. (Department: 3723)

Abrading

Accessory

C451S526000, C451S539000, C451S538000

Reexamination Certificate

active

07125326

ABSTRACT:
The invention provides a pad removal apparatus and method that enables improved pad removal from a platen.

REFERENCES:
patent: 5454899 (1995-10-01), Glenn et al.
patent: 5551136 (1996-09-01), Bartlett
patent: 6004426 (1999-12-01), Johnson
patent: 6221199 (2001-04-01), Chang et al.
patent: 6299519 (2001-10-01), Easter et al.
patent: 6600000 (2003-07-01), Ooura et al.

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