Liquid purification or separation – Processes – Liquid/liquid solvent or colloidal extraction or diffusing...
Patent
1998-05-19
2000-06-13
Cintins, Ivars
Liquid purification or separation
Processes
Liquid/liquid solvent or colloidal extraction or diffusing...
210688, 210798, 210804, 210805, 210167, 210196, 210259, 21032169, 210411, B01D 3604
Patent
active
060745614
ABSTRACT:
In a developing, etching and stripping apparatus, photoresist developing and stripping chemicals are drawn off into separate circulatory paths in each of which they are pumped through a heat exchanger, a series of tangential filters, an ultraviolet contactor and a collection tank. Permeate from the filters is returned to the developing or stripping stage, and solutions with high concentrations of solids are removed from the collection tanks for disposal. A similar system is used to recycle metal stripping solutions such as nitric acid-containing solutions, allowing recovery of metals.
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Cintins Ivars
PhoenAnkh Corp.
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