Photocopying – Projection printing and copying cameras – Step and repeat
Reexamination Certificate
2011-04-19
2011-04-19
Nguyen, Hung Henry (Department: 2882)
Photocopying
Projection printing and copying cameras
Step and repeat
C355S030000
Reexamination Certificate
active
07929109
ABSTRACT:
Immersion fluid remaining on a portion of a substrate after that portion has passed an immersion nozzle is removed by moving the substrate relative to an immersion nozzle so that the portion of the substrate on which the immersion fluid remains is passed by the immersion nozzle again. A path is determined along which the substrate is to be moved to remove the remaining immersion fluid. The path can be determined based upon previous movements of the substrate, including factors such as the speed and/or length of the previous movements. Alternatively, portions of the substrate on which immersion fluid remains can be detected, and then the substrate can be moved so that the portion of the substrate on which the immersion fluid remains is passed by the immersion nozzle based on the results of the detection. Immersion fluid also can be removed from the stage surface located beyond the substrate.
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Keswani Gaurav
Kho Leonard Wai Fung
Poon Alex Ka Tim
Nguyen Hung Henry
Nikon Corporation
Oliff & Berridg,e PLC
Whitesell-Gordon Steven H
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