Photocopying – Projection printing and copying cameras – Step and repeat
Reexamination Certificate
2005-04-27
2011-11-08
Glick, Edward (Department: 2882)
Photocopying
Projection printing and copying cameras
Step and repeat
C355S030000
Reexamination Certificate
active
08054448
ABSTRACT:
An apparatus and method are disclosed for providing fluid for immersion lithography. Immersion fluid is injected into an inner cavity in a direction that is different than a direction in which the nozzle moves. The immersion fluid can also be injected at different rates into the inner cavity at different sides. A wafer substrate is then exposed by light through the immersion fluid.
REFERENCES:
patent: 3648587 (1972-03-01), Stevens
patent: 4346164 (1982-08-01), Tabarelli et al.
patent: 4480910 (1984-11-01), Takanashi et al.
patent: 4509852 (1985-04-01), Tabarelli et al.
patent: 5610683 (1997-03-01), Takahashi
patent: 5715039 (1998-02-01), Fukuda et al.
patent: 5825043 (1998-10-01), Suwa
patent: 6262796 (2001-07-01), Loopstra et al.
patent: 6341007 (2002-01-01), Nishi et al.
patent: 7053983 (2006-05-01), Tokita
patent: 7292313 (2007-11-01), Poon et al.
patent: 7367345 (2008-05-01), Hemker et al.
patent: 7388648 (2008-06-01), Lof et al.
patent: 7576833 (2009-08-01), Poon et al.
patent: 2002/0163629 (2002-11-01), Switkes et al.
patent: 2002/0191166 (2002-12-01), Hasegawa et al.
patent: 2003/0030916 (2003-02-01), Suenaga
patent: 2003/0174408 (2003-09-01), Rostalski et al.
patent: 2004/0000627 (2004-01-01), Schuster
patent: 2004/0060195 (2004-04-01), Garcia et al.
patent: 2004/0075895 (2004-04-01), Lin
patent: 2004/0109237 (2004-06-01), Epple et al.
patent: 2004/0114117 (2004-06-01), Bleeker
patent: 2004/0118184 (2004-06-01), Violette
patent: 2004/0119954 (2004-06-01), Kawashima et al.
patent: 2004/0125351 (2004-07-01), Krautschik
patent: 2004/0136494 (2004-07-01), Lof et al.
patent: 2004/0160582 (2004-08-01), Lof et al.
patent: 2004/0165159 (2004-08-01), Lof et al.
patent: 2004/0169834 (2004-09-01), Richter et al.
patent: 2004/0169924 (2004-09-01), Flagello et al.
patent: 2004/0180294 (2004-09-01), Baba-Ali et al.
patent: 2004/0180299 (2004-09-01), Rolland et al.
patent: 2004/0182422 (2004-09-01), Boyd et al.
patent: 2004/0207824 (2004-10-01), Lof et al.
patent: 2004/0211920 (2004-10-01), Derksen et al.
patent: 2004/0224265 (2004-11-01), Endo et al.
patent: 2004/0224525 (2004-11-01), Endo et al.
patent: 2004/0227923 (2004-11-01), Flagello et al.
patent: 2004/0233405 (2004-11-01), Kato et al.
patent: 2004/0253547 (2004-12-01), Endo et al.
patent: 2004/0253548 (2004-12-01), Endo et al.
patent: 2004/0257544 (2004-12-01), Vogel et al.
patent: 2004/0259008 (2004-12-01), Endo et al.
patent: 2004/0259040 (2004-12-01), Endo et al.
patent: 2004/0263808 (2004-12-01), Sewell
patent: 2004/0263809 (2004-12-01), Nakano
patent: 2005/0002004 (2005-01-01), Kolesnychenko et al.
patent: 2005/0007569 (2005-01-01), Streefkerk et al.
patent: 2005/0007570 (2005-01-01), Streefkerk et al.
patent: 2005/0018155 (2005-01-01), Cox et al.
patent: 2005/0018156 (2005-01-01), Mulkens et al.
patent: 2005/0024609 (2005-02-01), De Smit et al.
patent: 2005/0030497 (2005-02-01), Nakamura
patent: 2005/0030498 (2005-02-01), Mulkens
patent: 2005/0030506 (2005-02-01), Schuster
patent: 2005/0036121 (2005-02-01), Hoogendam et al.
patent: 2005/0036183 (2005-02-01), Yeo et al.
patent: 2005/0036184 (2005-02-01), Yeo et al.
patent: 2005/0036213 (2005-02-01), Mann et al.
patent: 2005/0037269 (2005-02-01), Levinson
patent: 2005/0041225 (2005-02-01), Sengers et al.
patent: 2005/0042554 (2005-02-01), Dierichs et al.
patent: 2005/0046813 (2005-03-01), Streefkerk et al.
patent: 2005/0046934 (2005-03-01), Ho et al.
patent: 2005/0048223 (2005-03-01), Pawloski et al.
patent: 2005/0068639 (2005-03-01), Pierrat et al.
patent: 2005/0073670 (2005-04-01), Carroll
patent: 2005/0084794 (2005-04-01), Meagley et al.
patent: 2005/0094116 (2005-05-01), Flagello et al.
patent: 2005/0100745 (2005-05-01), Lin et al.
patent: 2005/0110973 (2005-05-01), Streefkerk et al.
patent: 2005/0117224 (2005-06-01), Shafer et al.
patent: 2005/0122497 (2005-06-01), Lyons et al.
patent: 2005/0132914 (2005-06-01), Mulkens et al.
patent: 2005/0134815 (2005-06-01), Van Santen et al.
patent: 2005/0134817 (2005-06-01), Nakamura
patent: 2005/0141098 (2005-06-01), Schuster
patent: 2005/0145265 (2005-07-01), Ravkin et al.
patent: 2005/0145803 (2005-07-01), Hakey et al.
patent: 2005/0146694 (2005-07-01), Tokita
patent: 2005/0146695 (2005-07-01), Kawakami
patent: 2005/0147920 (2005-07-01), Lin et al.
patent: 2005/0153424 (2005-07-01), Coon
patent: 2005/0158673 (2005-07-01), Hakey et al.
patent: 2005/0164502 (2005-07-01), Deng et al.
patent: 2005/0168713 (2005-08-01), Vogel et al.
patent: 2005/0174549 (2005-08-01), Duineveld et al.
patent: 2005/0175940 (2005-08-01), Dierichs
patent: 2005/0185269 (2005-08-01), Epple et al.
patent: 2005/0190435 (2005-09-01), Shafer et al.
patent: 2005/0190455 (2005-09-01), Rostalski et al.
patent: 2005/0205108 (2005-09-01), Chang et al.
patent: 2005/0213061 (2005-09-01), Hakey et al.
patent: 2005/0213072 (2005-09-01), Schenker et al.
patent: 2005/0217135 (2005-10-01), O'Donnell et al.
patent: 2005/0217137 (2005-10-01), Smith et al.
patent: 2005/0217703 (2005-10-01), O'Donnell
patent: 2005/0219481 (2005-10-01), Cox et al.
patent: 2005/0219482 (2005-10-01), Baselmans et al.
patent: 2005/0219499 (2005-10-01), Zaal et al.
patent: 2005/0225737 (2005-10-01), Weissenrider et al.
patent: 2005/0231694 (2005-10-01), Kolesnychenko et al.
patent: 2005/0237501 (2005-10-01), Furukawa et al.
patent: 2005/0243292 (2005-11-01), Baselmans et al.
patent: 2005/0245005 (2005-11-01), Benson
patent: 2005/0253090 (2005-11-01), Gau et al.
patent: 2005/0259232 (2005-11-01), Streefkerk et al.
patent: 2005/0259233 (2005-11-01), Streefkerk et al.
patent: 2005/0259234 (2005-11-01), Hirukawa et al.
patent: 2005/0264778 (2005-12-01), Lof et al.
patent: 2005/0270505 (2005-12-01), Smith
patent: 2005/0280791 (2005-12-01), Nagasaka et al.
patent: 2005/0282405 (2005-12-01), Harpham et al.
patent: 2006/0023183 (2006-02-01), Novak et al.
patent: 2006/0023188 (2006-02-01), Hara
patent: 2006/0038968 (2006-02-01), Kemper et al.
patent: 2006/0061739 (2006-03-01), Hoogendam et al.
patent: 2006/0087630 (2006-04-01), Kemper et al.
patent: 2006/0119818 (2006-06-01), Nagasaka
patent: 2006/0139593 (2006-06-01), Nagasaka et al.
patent: 2006/0152697 (2006-07-01), Poon et al.
patent: 2006/0158627 (2006-07-01), Kemper et al.
patent: 2006/0176456 (2006-08-01), Nagasaka et al.
patent: 2006/0209278 (2006-09-01), Kiuchi et al.
patent: 2006/0209414 (2006-09-01), Van Santen et al.
patent: 2006/0261288 (2006-11-01), Van Santen
patent: 2007/0110213 (2007-05-01), Leenders et al.
patent: 2007/0222967 (2007-09-01), Poon et al.
patent: 2008/0291409 (2008-11-01), Nakano
patent: 2009/0002648 (2009-01-01), Poon et al.
patent: 1501173 (2004-06-01), None
patent: 221 563 (1985-04-01), None
patent: 224 448 (1985-07-01), None
patent: 0 605 103 (1994-07-01), None
patent: 1 420 298 (2004-05-01), None
patent: 1 489 462 (2004-06-01), None
patent: 1 477 856 (2004-11-01), None
patent: 1 486 827 (2004-12-01), None
patent: 1 571 697 (2005-09-01), None
patent: 1 598 855 (2005-11-01), None
patent: 1 612 850 (2006-01-01), None
patent: 1646074 (2006-04-01), None
patent: 1646075 (2006-04-01), None
patent: 1662554 (2006-05-01), None
patent: A-57-153433 (1982-09-01), None
patent: A-58-202448 (1983-11-01), None
patent: A-59-19912 (1984-02-01), None
patent: A-62-65326 (1987-03-01), None
patent: A-63-157419 (1988-06-01), None
patent: A-4-305915 (1992-10-01), None
patent: A-4-305917 (1992-10-01), None
patent: A-5-62877 (1993-03-01), None
patent: A-6-124873 (1994-05-01), None
patent: A-7-220990 (1995-08-01), None
patent: A-8-316125 (1996-11-01), None
patent: A-10-303114 (1998-11-01), None
patent: A-10-340846 (1998-12-01), None
patent: A-11-176727 (1999-07-01), None
patent: A-2000-58436 (2000-02-01), None
patent: A-2004-289126 (2004-10-01), None
patent: A-2004-320016 (2004-11-01), None
patent: A-2004-349645 (2004-12-01), None
patent: A-2005-12228 (2005-01-01), None
patent: A-2005-19864 (2005-01-01), None
patent: A-2005-045082 (2005-02-01), None
patent: A-2005-045223 (2005-02-01), None
patent: A-2005-045232 (2005-02-01), None
patent: A-2005-109426 (2005-04-01), None
patent: A-2006-510146 (2006-03-01), None
patent: A-2006-511021 (2006-03-0
Kho Leonard Wai Fung
Poon Alex Ka Tim
Asfaw Mesfin T
Glick Edward
Nikon Corporation
Oliff & Berridg,e PLC
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