Expansible chamber devices – With non-sealing cleaning means
Patent
1993-03-18
1994-08-16
Gluck, Richard E.
Expansible chamber devices
With non-sealing cleaning means
417431, F01B 3100
Patent
active
053376510
ABSTRACT:
A means and method for protecting the moving parts of a pump that is used to pump air- or moisture-sensitive liquids, comprising blanketing the wetted parts of the pump with an inert medium and/or admixing the process liquid with a low vapor pressure liquid component effective for inhibiting corrosion or particulate formation. In another aspect, the invention relates to an apparatus for protecting the wetted, moving parts of pumps used to pump air- or moisture-sensitive liquids. The apparatus provides a mantle within which an inert medium is flowed around the moving, wetted pump parts to continually purge them of any air or moisture.
REFERENCES:
patent: 1483143 (1924-02-01), Whitlock
patent: 3516760 (1970-06-01), Dettinger
patent: 4833976 (1989-05-01), Loland
patent: 5204314 (1993-03-01), Kirlin et al.
Novellus Concept One System Manual, Revision 2, Jul. 5, 1989, Section 4, vol. 1, pp. 4-43, 4-44, and 4-100, Novellus Corporation, San Jose, California.
Gardiner Robin A.
Kirlin Peter S.
Advanced Technology & Materials Inc.
Elliott Janet R.
Gluck Richard E.
Hultquist Steven J.
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