Coating processes – Coating by vapor – gas – or smoke
Patent
1994-08-15
1995-07-11
Lusignan, Michael
Coating processes
Coating by vapor, gas, or smoke
92 87, 417431, 422 7, 422 9, 4272556, C23C 1600
Patent
active
054319579
ABSTRACT:
A means and method for protecting the moving parts of a pump that is used to pump air- or moisture-sensitive liquids, comprising blanketing the wetted parts of the pump with an inert medium and/or admixing the process liquid with a low vapor pressure liquid component effective for inhibiting corrosion or particulate formation. In another aspect, the invention relates to an apparatus for protecting the wetted, moving parts of pumps used to pump air- or moisture-sensitive liquids. The apparatus provides a mantle within which an inert medium is flowed around the moving, wetted pump parts to continually purge them of any air or moisture.
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Novellus Concept One System Manual, Revision 2, Jul. 5, 1989, Section 4, vol. 1, pp. 4-43, 4-44, 4-100, Novella Corp., San Jose, Calif.
Gardiner Robin A.
Kirlin Peter S.
Advanced Technology & Materials Inc.
Elliott Janet R.
Hultquist Steven J.
Lusignan Michael
Wasserman Fran S.
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