Semiconductor device manufacturing: process – Making device array and selectively interconnecting – Using structure alterable to conductive state
Patent
1996-08-20
1998-05-19
Niebling, John
Semiconductor device manufacturing: process
Making device array and selectively interconnecting
Using structure alterable to conductive state
438467, 438469, H01L 2182
Patent
active
057535400
ABSTRACT:
Disclosed is a method for programming an antifuse structure. The antifuse structure is programmed by applying an alternating current having alternating current pulses between a bottom and a top electrode to generate a conduction path through an antifuse material sandwiched between the electrodes. The conduction path is formed incrementally due to an electron flow produced as a result of each alternating current pulse thereby defining the conduction path at a substantially centered portion of the antifuse material.
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Han Yu-Pin
Loh Ying-Tsong
Sanchez Ivan
Wu Koucheng
Booth Richard A.
Niebling John
VLSI Technology Inc.
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