Abrading – Abrading process – Glass or stone abrading
Reexamination Certificate
2005-02-15
2005-02-15
Rachuba, M. (Department: 3723)
Abrading
Abrading process
Glass or stone abrading
C451S287000, C438S690000
Reexamination Certificate
active
06855035
ABSTRACT:
The apparatus and method for producing a substrate having a substrate surface by polishing the substrate surface, which includes a metallic wire.A polishing liquid is supplied a clearance between the substrate surface and the surface of a polishing pad. The polishing liquid includes an acid which dissolves the oxidized part of the substrate surface and is substantially free of solid abrasive powder.A relative movement is generated between the substrate surface and the polishing pad surface while the substrate surface is pressed against the polishing pad surface while the polishing liquid is supplied so that the dissolved oxidized part of the substrate surface can be removed from the substrate.
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“A New Slurry-free CMP Technique for Cu Interconnects Published on Semi-Technology Symposium”, 1998.
Hom-ma Yoshio
Imai Toshinori
Ohashi Naofumi
Sakuma Noriyuki
Mattingly Stanger & Malur, P.C.
Rachuba M.
Renesas Technology Corp.
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