Apparatus and method for producing semiconductor device

Details Apparatus and method for producing semiconductor device Apparatus and method for producing semiconductor device

1989-11-15

1991-06-25

Chaudhuri, Olik

Fishing, trapping, and vermin destroying

437212, 437217, 437250, 437949, H01L 2146

Patent

active

050266683

ABSTRACT:
An apparatus for producing a semiconductor device includes a dust-proof cover which covers a dust-generating portion in the apparatus such as a mold for effecting resin-molding of the semiconductor device composed of a lead frame and semiconductor chips wire- and die-bonded thereto, and a dust collecting device for collecting dust which is suspended by the air inside the dust-proof cover.

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patent: 4890780 (1990-02-01), Mimata et al.
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