Data processing: generic control systems or specific application – Specific application – apparatus or process – Mechanical control system
Reexamination Certificate
2007-12-05
2010-10-05
Rodriguez, Paul L (Department: 2123)
Data processing: generic control systems or specific application
Specific application, apparatus or process
Mechanical control system
C702S050000, C702S100000, C137S014000, C137S487000, C073S001360
Reexamination Certificate
active
07809473
ABSTRACT:
A mass flow controller includes a thermal mass flow sensor in combination with a pressure sensor to provide a mass flow controller that is relatively insensitive to fluctuations in input pressure. The pressure sensor and thermal sensor respectively provide signals to an electronic controller indicating the measured inlet flow rate and the pressure within the dead volume. The electronic controller employs the measured pressure to compensate the measured inlet flow rate and to thereby produce a compensated measure of the outlet flow rate, which may be used to operate a mass flow controller control valve.
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Ambrosnia Jesse
Kottenstette Nicholas
Shajii Ali
McDermott Will & Emery LLP
MKS Instruments Inc.
Rao Sheela
Rodriguez Paul L
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