Fluid handling – Processes – With control of flow by a condition or characteristic of a...
Reexamination Certificate
2005-08-23
2005-08-23
Krishnamurthy, Ramesh (Department: 3753)
Fluid handling
Processes
With control of flow by a condition or characteristic of a...
C137S486000, C137S487500, C137S599130
Reexamination Certificate
active
06932098
ABSTRACT:
A mass flow controller includes a thermal mass flow sensor in combination with a pressure sensor to provide a mass flow controller that is relatively insensitive to fluctuations in input pressure. The pressure sensor and thermal sensor respectively provide signals to an electronic controller indicating the measured inlet flow rate and the pressure within the dead volume. The electronic controller employs the measured pressure to compensate the measured inlet flow rate and to thereby produce a compensated measure of the outlet flow rate, which may be used to operate a mass flow controller control valve.
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Ambrosina Jesse
Clark William R.
Kottenstette Nicholas
Shajii Ali
Smith Donald K.
Krishnamurthy Ramesh
McDermott Will & Emery LLP
MKS Instruments Inc.
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