Apparatus and method for preparing an abrasive coated substrate

Details Apparatus and method for preparing an abrasive coated substrate Apparatus and method for preparing an abrasive coated substrate

1983-02-02

1984-02-07

Newsome, John H.

Coating processes

Electrical product produced

Integrated circuit, printed circuit, or circuit board

427 40, 427 41, B05D 306

Patent

active

044303610

ABSTRACT:
An improved method of preparing a coating by subjecting gaseous precursors to a glow discharge and an apparatus suitable for carrying out such a method are disclosed. The improvement includes mounting a substrate onto a plate of ferromagnetic material which enhances the deposition rate of the coating within the electrode area.

REFERENCES:
patent: 3310424 (1967-03-01), Wehner et al.
patent: 3485666 (1969-12-01), Sterling et al.
patent: 4096315 (1978-06-01), Kubacki
patent: 4260647 (1981-04-01), Wang et al.
patent: 4328646 (1982-05-01), Kaganowicz
patent: 4355052 (1982-10-01), Kaganowicz et al.
patent: 4361595 (1982-11-01), Kaganowicz et al.

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