Apparatus and method for pre-conditioning a conditioning disc

Details Apparatus and method for pre-conditioning a conditioning disc Apparatus and method for pre-conditioning a conditioning disc

2005-02-22

2005-02-22

Morgan, Eileen P. (Department: 3723)

Abrading

Abrading process

With tool treating or forming

C451S443000

Reexamination Certificate

active

06857942

ABSTRACT:
An apparatus and a method for off-line pre-conditioning a conditioning disc that is used in a chemical mechanical polishing process are provided. In the apparatus, an upper platform for mounting a conditioning disc thereto and a lower platform for mounting a polishing pad thereto are engaged together under a pre-set pressure and rotated in opposite directions for a pre-set length of time. The apparatus is effective in removing loose particles from the surface of the conditioning disc such that the possibility of any such particles causing scratches on a wafer surface during a subsequently conducted chemical mechanical polishing process is eliminated. The present invention novel apparatus can be used off-line for pre-conditioning a conditioning disc such that valuable machine time of a chemical mechanical polishing apparatus is not wasted.

REFERENCES:
patent: 5626509 (1997-05-01), Hayashi
patent: 5954570 (1999-09-01), Yano et al.
patent: 5984764 (1999-11-01), Saito et al.
patent: 5997385 (1999-12-01), Nishio
patent: 6120350 (2000-09-01), Zhou et al.

Affiliated with

Also associated with

Rating

Apparatus and method for pre-conditioning a conditioning disc does not yet have a rating. At this time, there are no reviews or comments for this patent.

If you have personal experience with Apparatus and method for pre-conditioning a conditioning disc, we encourage you to share that experience with our LandOfFree.com community. Your opinion is very important and Apparatus and method for pre-conditioning a conditioning disc will most certainly appreciate the feedback.

Rate now

Comments { 0 }

Profile ID: LFUS-PAI-O-3449879