Electrolysis: processes – compositions used therein – and methods – Electrolytic coating – Coating selected area
Reexamination Certificate
2008-02-20
2011-11-01
Van, Luan (Department: 1724)
Electrolysis: processes, compositions used therein, and methods
Electrolytic coating
Coating selected area
C205S123000, C204S22400M
Reexamination Certificate
active
08048282
ABSTRACT:
A plating apparatus and method bubbles generated at the plating surfaces easily removed and the uniformity of the thickness of the plated film within the plated surface can be improved. The plating apparatus has a cassette table for loading a cassette in which a substrate having a plating surface is contained. An aligner for aligning the substrate, a rinser-dryer for rinsing and drying the substrate, and a plating unit for plating the substrate are also provided. The plating unit includes a plating vessel containing a plating solution, and a holder holds the substrate to immerse the substrate in the plating solution in the plating vessel. The plating surface is exposed to a nozzle which ejects the plating solution toward the plating surface.
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Endo Yasuhiko
Kuriyama Fumio
Sekimoto Masahiko
Strausser Stephen
Ebara Corporation
Van Luan
Wenderoth , Lind & Ponack, L.L.P.
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