Electric heating – Metal heating – By arc
Reexamination Certificate
2007-04-03
2007-04-03
Paschall, Mark (Department: 3742)
Electric heating
Metal heating
By arc
C219S121550, C219S121570, C156S345440, C118S7230IR
Reexamination Certificate
active
10487232
ABSTRACT:
A plasma processing system including a process chamber, a substrate holder provided within the process chamber, and a gas injection system configured to supply a first gas and a second gas to the process chamber. The system includes a controller that controls the gas injection system to continuously flow a first gas flow to the process chamber and to pulse a second gas flow to the process chamber at a first time. The controller pulses a RF power to the substrate holder at a second time. A method of operating a plasma processing system is provided that includes adjusting a background pressure in a process chamber, where the background pressure is established by flowing a first gas flow using a gas injection system, and igniting a processing plasma in the process chamber. The method includes pulsing a second gas flow using the gas injection system at a first time, and pulsing a RF power to a substrate holder at a second time.
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Paschall Mark
Tokyo Electron Limited
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