Optics: measuring and testing – By dispersed light spectroscopy – With sample excitation
Patent
1982-08-26
1986-02-25
Evans, F. L.
Optics: measuring and testing
By dispersed light spectroscopy
With sample excitation
G01J 3443, G01N 2163
Patent
active
045726680
ABSTRACT:
An optical system is disclosed which significantly enhances the throughput of a grating spectrometer intended to determine impurity concentrations on the surface of semiconductor materials (usually single crystal silicon) used for integrated circuits. The system, which uses a laser beam as the photo-excitation means impinging on a Dewar-contained sample, includes a pre-sample series of lenses which so shapes the laser beam that its shape at the point of impingement on the sample is proportionally similar to the shape of the monochromator slit in the spectrometer. The same lens which provides final focusing of the laser beam on the sample also collects the sample-emitted radiation, which is thereafter focused by suitable optics on the monochromator slit, where it preferably substantially matches the shape of the slit, but slightly overfills the slit.
REFERENCES:
patent: 4022529 (1977-05-01), White
Barrett et al., Journal of the Optical Society of America, vol. 58, No. 3, Mar. 1968, pp. 311-319.
Avanesyan et al., Sov. J. Quantum Electron, vol 7, No. 4, Apr. 1977, pp. 403-405.
Evans F. L.
Midac Corporation
Plante Thomas J.
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