Radiant energy – Luminophor irradiation
Patent
1984-08-17
1985-12-31
Smith, Alfred E.
Radiant energy
Luminophor irradiation
2504591, 250341, G01J 300
Patent
active
045623562
ABSTRACT:
An apparatus, for photo-luminescent analysis of the surface of crystalline silicon, is disclosed, in which the photons emitted from the sample are passed through a two-beam (or two-arm) interferometer, having the usual beamsplitter, fixed mirror, and movable mirror. The interferometer output is directed to a detector which is a germanium photo-diode, cooled in a Dewar, which also cools the initial electronic circuitry to which the detector output is input. Using the disclosed apparatus, methods are available for readily eliminating the negative effect of the electron-hole-droplet phenomenon, and for utilizing the no-photon region of the spectrum to identify otherwise unidentified impurity (or dopant) materials.
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Hannaher Constantine
Midac Corporation
Plante Thomas J.
Smith Alfred E.
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