Apparatus and method for performing predetermined processing...

Details Apparatus and method for performing predetermined processing... Apparatus and method for performing predetermined processing...

2005-11-29

2009-11-17

Stinson, Frankie L (Department: 1792)

Cleaning and liquid contact with solids

Apparatus

With endless belt work conveyer

Reexamination Certificate

active

07617833

ABSTRACT:
A blocking plate3is disposed opposing a substrate W which is held by plural chuck pins17and a processing liquid is supplied from a processing liquid nozzle5to a space SP between the front surface Wf of the substrate and an opposed surface3aof the blocking plate3, whereby the processing liquid attains the liquid-tight state. While the liquid-tight state with the processing liquid is maintained, the substrate W and the blocking plate3rotate. In this condition, a liquid (pure water) to which ultrasonic vibration has propagated is injected from an ultrasonic nozzle7approximately perpendicular to a side wall surface3bof the blocking plate3. While the ultrasonic vibration spreads inside the blocking plate3along the horizontal direction, some vibrational waves spread uniformly and widely from the opposed surface3ato the processing liquid attaining the liquid-tight state and vibrate the processing liquid. This prevents concentration of the vibrational energy at the front surface Wf, which makes it possible to uniformly process the substrate W while suppressing damage to the substrate W.

REFERENCES:
patent: 5927306 (1999-07-01), Izumi et al.
patent: 6539952 (2003-04-01), Itzkowitz
patent: 64-27679 (1989-01-01), None
patent: 8-130202 (1996-05-01), None
patent: 2000-508237 (2000-07-01), None
patent: 2002-86068 (2002-03-01), None
patent: 2004-515053 (2004-05-01), None
Japanese Office Action issued Jul. 14, 2009 in connection with corresponding Japanese Patent Application No. 2004-368887 (JP8-130202 was previously submitted in an IDS filed Jan. 27, 2006 and is therefore not enclosed).

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